半導体プロセスにおけるSiCコーティング・コレクター・トップの用途
Silicon carbide (SiC) coating Collector Tops are vital in semiconductor manufacturing due to their exceptional properties. These sic coatings withstand temperatures up to 1600°C and offer high thermal conductivity of 200 W/m·K, ensuring efficient heat dissipation. The sic coating process provides oxidation resistance and contamination prevention capabilities that maintain component integrity in extreme environments. […]